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Semiconductor Archives - Eagle Harbor Technologies

High Aspect Ratio Etching

High aspect ratio etching requires precision control of the ion energy distribution (IED) at the wafer surface. EHT bias power systems like Spartan, Hoplite, and Perseus go beyond traditional RF to offer users unprecedented waveform adjustability, which allows for precision control of the IED. These systems can operate at high, average power (5-20 kW) and…

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