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Semiconductor

For semiconductor applications, EHT power systems are sold through EHT Semi, leaders in plasma control for semiconductor processing. With Small Business Innovation Research grants, strategic partnerships, and customers on the frontier of semiconductor processing, they rapidly innovate and design power solutions to meet your specific semiconductor application needs. Their engineers are experts in the interface of plasma and power, who can integrate pulsed-DC and matchless RF power systems into your chamber or work with you to co-design custom solutions.